Altmann

Dipl.-Phys. Frank Altmann

Kontakt:

  Tel: ~345-5589139
  Fax: ~345-5589101
  Email: frank.altmann@~remove.these.four.words~iwmh.fraunhofer.de
  Web: http://www.iwm.fraunhofer.de/unsere-leistungen...

 

 

 


Geförderte Projekte im Exzellenzcluster (07/2005-06/2008)

Arbeitsgebiete

  • diagnostic at semiconductor technologies and technology optimization,
  • thermal failure localisation,
  • focused ion beam preparation techniques,
  • precise mechanical preparation methods,
  • thermo-mechanical simulation.

Publikationen

  • E. Langer, F. Altmann, D. Katzer, W. Neumann, "Strain measurement by means of convergent beam electron diffraction in submicron volumes", Proc. of the Int. Conf. and Exhibition, Micro Mat 97 1997, April 16-18, 1115-1117
  • F. Altmann, F, D. Katzer, "Cross-sectional preparation from ICs downside for SEM and TEM failure analysis using focused ion beam etching", Thin solid films 343-344 (1999) 609-611
  • A. Heilmann, F. Altmann, D. Katzer, F. Müller, Th. Sawitowski, G. Schmid, "Determination of the pore size and vertical structure of nanoporous aluminium oxide membranes", Applied Surface Science, 144-145, 1999, 682-685
  • Breitenstein, F. Altmann, "Lokalisierung von Gate-Leckströmen in FETs mit Lock-in-Thermographie", Spectrum, Ausgabe 77, Oktober 1999, S. 6
  • Breitenstein, M. Langenkamp, F. Altmann, D. Katzer, A. Lindner, E. Eggers, "Microscopic lock in thermography investigation of leakage sites in integrated circuits", Rev. of Scientific Instruments, 71 (2000), 4155-4160
  • F. Altmann, "FIB-Zielpräparation von TEM-Proben mittels Nadelmanipulationstechnik", Praktische Metallographie 40 (2003) 175-183 (M98/2003)
  • F. Altmann, "Fault Localisation of ICs by Lock-in Fluorescent Microthermal Imaging (Lock-in FMI)", Tagung Quantitative Infrared Thermography QIRT, Rhode Saint Genèse, Belgium, 5.-8. Juli 2004
  • F. Altmann, "TEM-Zielpräparation unter REM-Beobachtung mit der Zeiss NTS Crossbeam", Praktische Metallographie 42 (2005)
  • A. Heilmann, F. Altmann, D. Katzer, F. Müller, Th. Sawitowski, G. Schmid, "Determination of the pore size and vertical structure of nanoporous aluminium oxide membranes", Applied Surface Science, 144-145, 1999, 682-685
  • S. Huth, O. Breitenstein, A. Huber, D. Danz, U. Lambert, F. Altmann, "Lock-In IR-Thermography - A novel tool for material and device characterization", Solid State Phenomena 82-84 (2002), 741-746

(letzte Änderung: 08.12.2015, 13:14 Uhr)